Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measurement tool. The system is also able to introduce 200 mm Wafers into a suitable adapter enabling processing on standard 300 mm tools and handle the 200 mm wafers in adapter into a SEMI standard 300 mm FOUP.
| CPV-Code: |
42990000
38500000
|
| Abgabefrist: |
22.02.2026 |
| Typ: |
ContractNotice |
| Status: |
None |
| Aufgabe: |
None |
| Vergabestelle: |
| name: |
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. |
| address: |
Am Wolfsmantel 33 Erlangen |
| postal_code: |
91058 |
| city: |
Erlangen - DE |
| country: |
DE |
| email: |
einkauf@iis.fraunhofer.de |
| phone: |
+49 91317762230 |
| contact_point: |
+49 91317762230 einkauf@iis.fraunhofer.de |
| idate: |
20. Januar 2026 09:06 |
| udate: |
20. Januar 2026 09:06 |
| doc: |
|
| authority_types: |
|
| activities: |
|
|
| Quelle: |
https://ted.europa.eu/de/notice/-/detail/00039990-2026 |
| Unterlagen: |
http://www.deutsche-evergabe.de/dashboards/dashboard_off/fb2c0264-dd95-4e19-bd02-d23d57adfd89 |
| Zuschlagskriterium: |
price |
| Vertrag: |
None |
| Prozedur: |
vgv |
| Nuts: |
None |
| Veröffentlichung: |
19.01.2026 |
| Erfüllungsort: |
Erlangen - DE |
| Link: |
|
| Lose: |
| Name |
Los Nr 1 None |
| Gewinner |
None |
| Datum |
|
| Wert |
None |
| Anzahl Angebote |
None |
|